- with ANSYS(R) FEM-program for UNIX and PC workstations
- MEMS-sensors based on silicon with piezoelectric thin-film layers
- and etched quartz crystals (DETF).
- piezoelectric simulation of MEMS sensors & actuators
- silicon resonators & actuators (beams, diaphragms, cantilever, etc.)
- with ZnO & AlN piezoelectric thin-film layers for excitation & detection
- hybrid bimorph Si bimorph-structures with PZT ceramics (PoC)
- triple-beam force sensors based on silicon / ZnO thin films
- HF-etched quartz crystals with Au electrodes
- use of different quartz cuts
- Double-Ended-Tuning-Fork (DETF)
- https://katalog.slub-dresden.de/id/0-016158210
- https://tfconsult.com/piezoelectrical-driven-force-sensor/
- https://tfconsult.com/entwurf-und-auslegung-mikromechanischer-strukturen/
- https://tfconsult.com/microsystems-modeling/
- https://tfconsult.com/berechnung-von-quarz-kraftsensoren/
- https://tfconsult.com/piezoelectric-micro-actuators/
- https://tfconsult.com/tag/piezo/
- https://tfconsult.com/tag/quarz/
- https://tfconsult.com/tag/zno/