ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
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Updated
Jul 15, 2024 - Roff
ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
ANSYS analyses of triple-beam silicon sensors, Silizium-Dreifachstimmgabel, Si(100)
BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung Frequenzanaloger Sensoren, HSG-IMIT, Villingen-Schwenningen
Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems
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